BURNBOX / SCRUBBER FEATURES
|Ability to treat the substantial number
of chemicals involved in semiconductor fabrication and materials
||Compact construction, simple installation.
||10 liter/min capabilities, larger rates
of treatment for certain applications.
||Stainless steel piping and standard 1.0"
S/S KF style flanges for inlet/outlet connections.
||Safety interlock to process valves (dry
contact) shuts off gas flow if system is below required temperature.
||Convenient access to the removable burnbox
||Quick and simple maintenance techniques.
|Individual burnbox (BB-10-LM) or scrubber
(GSS-10-LM or our larger GSS-1250 (click
for image)) units are available as well as the combination.
||Spare ports for gas monitors and detectors.
||Spare and replacement components.
||Please consult sales office concerning
these and other options.|
UTILITIES REQUIRED (for proper operation)
|120 VAC, 50-60 Hz, 8 Amp, three wire
||Purge gases (1/4" connection):
||Inert gas (ie. He, Ar, or N2)
||Compressed air or O2
||Steel exhaust manifolding.
||Water coolant: 1 liter / min at 20 C to
30 C, 1/4" line size.