BURNBOX / SCRUBBER FEATURES
| Ability to treat the substantial number
of chemicals involved in semiconductor fabrication and materials
processing.
| Compact construction, simple installation.
| 10 liter/min capabilities, larger rates
of treatment for certain applications.
| Stainless steel piping and standard 1.0"
S/S KF style flanges for inlet/outlet connections.
| Safety interlock to process valves (dry
contact) shuts off gas flow if system is below required temperature.
| Convenient access to the removable burnbox
particle trap.
| Quick and simple maintenance techniques.
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GENERAL OPTIONS
| Individual burnbox (BB-10-LM) or scrubber
(GSS-10-LM or our larger GSS-1250 (click
for image)) units are available as well as the combination.
| Spare ports for gas monitors and detectors.
| Spare and replacement components.
| Please consult sales office concerning
these and other options. | |
UTILITIES REQUIRED (for proper operation)
| 120 VAC, 50-60 Hz, 8 Amp, three wire
| Purge gases (1/4" connection):
| Inert gas (ie. He, Ar, or N2)
| Compressed air or O2
| Steel exhaust manifolding.
| Water coolant: 1 liter / min at 20 C to
30 C, 1/4" line size.
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