VARI-VAC ® GAS METERING VALVES

A Low Cost, Precision Method for Gas Introduction into your Process System.

FEATURES

Reproducible precision flow rates.
A full flow range of interchangeable electropolished 316 S/S flow pins.
Helium mass spectrometer leak tight.
Right angle and inline designs.
Automatic and manual versions.
Stainless steel or plated brass valve body construction.
Bakeable to 200 C.
Your choice of connection fittings.

 

INTRODUCTION

The Tek-Vac Industries' VARI-VAC® is a smooth acting, bellows sealing gas metering valve available with manual, motor driven, solenoid, or electropneumatic controlling actuators.

The low cost and high precision reproducibility make the VARI-VAC® instrumental in applications of vacuum sputtering, gas mixing & calibration, mass spectroscopy, ion etching, gas chromotography, and a wide array of operations associated with vacuum and gas process control.

Minimized internal volume and surface area assist in reducing outgassing and permit a rapid response time for gas flow adjustments. Flow pins are available with capabilities to control flows of 0 - 10-3 std cc/sec. to 0 - 5000 std cc/sec. Flow control is available down to 1 x 10-8 std cc/sec.

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