PHOTORESIST CURING SYSTEM

Tek-Vac MODEL PRC-2000

A Compact Vacuum Bake Module, Ideal for Processing up to 12" x 12" wafers.
Digital temperature control with P.I.D and auto tune features for precision control.
Adjustable vacuum chucking pressure.
Timed thermal contact provides excellent reproducibility.
Automatic and manual versions.
Safety interlocked
Various fixture plates are available for multiple substrate processing.

The Tek-Vac PRC-2000 is a compact unit ideal for consistent curing of a broad range of photo resistant material and substrate sizes.

A clean room compatible thermal plate features a precision ground surface and exceptional heat transfer. Thermal uniformity across the substrate is typically +/- 1%.

The PRC-2000 utilities include:

Power requirements of 115 VAC, 50-60 hz, 12 amp.
Exhaust connection with a 2" to 1.25" reducer.
Standard fittings connect to house vacuum and exhaust manifold.

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