 | A Compact Vacuum Bake Module, Ideal for
Processing up to 12" x 12" wafers.
| Digital temperature control with P.I.D
and auto tune features for precision control.
| Adjustable vacuum chucking pressure.
| Timed thermal contact provides excellent
reproducibility.
| Automatic and manual versions.
| Safety interlocked
| Various fixture plates are available for
multiple substrate processing. | |
The Tek-Vac PRC-2000 is a compact unit ideal for consistent curing of a broad range of photo resistant material and substrate sizes.
A clean room compatible thermal plate features a precision ground surface and exceptional heat transfer. Thermal uniformity across the substrate is typically +/- 1%.
The PRC-2000 utilities include:
Power requirements of 115 VAC, 50-60 hz,
12 amp.
Exhaust connection with a 2" to 1.25" reducer.
Standard fittings connect to house vacuum and exhaust manifold.