VES - 3000 SYSTEM
TECHNICAL SPECIFICATIONS

 

Chamber assembly:

Bell jar: Standard 18" dia. X 18"/24"/30".
Larger sizes available (to 24" dia.).
Base pressure of 10-8 torr, depending on cleanliness.

Baseplate: Standard 20" dia. X 1" thick.
Type 304 stainless steel construction.
Sized to conform to larger belljar options.

Feedthrough collar: Standard 18"dia. X 3.5h". Number of ports and larger collars are customized to comply with specific requests.

Plumbing:

All valves, flanges and piping are constructed of type 304 stainless steel.

Standard Pumping System:

Roughing Pump: Standard 11 cfm with diffusion pump. Pumpdown time: approx. 5 minutes.

Diffusion Pump: Varian model VHS-6.
2400 l/s air. Ranges 10-3 to < 5 x 10-9 Torr.
Electrical: 50/60 Hz, 115/208/240 VAC, 2.2kW.
Water coolant: 50 lit/hr at 150C - 260C.
Baffle or cold cap option available.

Note: We do offer cryo and turbo pumps for this system, as well as mechanical and diffusion pumps with as specified capabilities. Notify us about your specific requirements.

General Electrical Utilities for VES-3000:

115/208/240 VAC, 50/60 Hz., 3-wire, 30 amps maximum.

General accessories and options:

Stainless steel process chamber.
Feedthroughs (see enclosed information).
Instrumentation (thermocouples, ion gauges, etc.)
Mass flow controllers (please specify desired number and capacities).
1 KVA SCR controlled evaporation sources.
Non-standard quartz substrate heater lamps.
Thin film shutters (automatic or manual).
Magnetron sputter sources.
Stainless steel planetary substrate holders.
Quartz crystal, film thickness rate monitors.
Electron beam gun evaporation sources and power supplies.

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