TEK-VAC INDUSTRIES, Inc. offers forty years of high vacuum and ultra-high vacuum technology experience to our customers in the form of production and R&D semiconductor process equipment. We offer systems which range from simple manual operation to fully automated turnkey. Our expertise includes design of operating system modes in broad temperature and pressure ranges, which provide accurate and reliable reproducibility.

Our clientele are diverse and include both large and small corporations, the U.S. government's Department of Energy and its national laboratories, and many colleges and universities. Tek-Vac has a line of standard systems and equipment, but due to the dynamic nature of our industry, we also specialize in custom design and manufacturing to our customer's specifications. In addition to our domestic concerns, Tek-Vac Industries markets and sells systems and components to European and Asian based companies and universities.

Typical processes for which our equipment is utilized includes:

Chemical Vapor Deposition (CVD) Reactive Ion Etching
Molecular Beam Epitaxy (MBE) Liquid Phase Epitaxy
Plasma Enhanced CVD (PECVD) Sputtering
Nuclear Gas Handling / Analysis Impregnation
Evaporation (Thermal & E-beam) Cluster Tools

Tek-Vac also markets standard product lines of vacuum chambers, vacuum furnaces, process gas treatment systems, gloveboxes, fluidized bed CVD reactors, metal organic CVD systems, ionization gauge tubes, gas metering valves, mass flow control electronics, vacuum feedthroughs, and many other related products (please see our Product Index). Services which we offer include various coating processes (CVD, PECVD, etc.), helium mass spectrometer leak detection, dye penetrant testing, thermal & vacuum testing, brazing (vacuum and atmospheric), welding (to ASME and Westinghouse Savannah River specifications), and machining.

Should you have a requirement for any of our systems or services, or would like further technical or application information on any of our systems, please feel free to contact our sales department with your specific requirements. Our innovative approaches to design will save you economically in capital equipment cost, as well as operating time and materials, while simultaneously providing the highest performance and quality standards. Once again, we appreciate your interest in Tek-Vac Industries, Inc.

Feel free to contact us with any questions.



Designed by B. Yatauro  

Updated June, 2011